APPARATUS WHICH SUCKS FLUID AND HAS FUNCTION TO BE ADSORBED ONTO OBJECT SURFACE

摘要

PROBLEM TO BE SOLVED: To attain stable operation of a vacuum pump by preventing excessive load and too little load on the vacuum pump and thereby to attain cost reduction. SOLUTION: A valve mechanism 91 is provided in the middle of a pipe 951 connecting a plurality of suction port units 201, 202 with a suction source unit 96, and opening of the valve may be optionally narrowed to increase resistance of a flow passage. Magnitude of a gap between opening of one suction port unit and an object surface 1 decreases and thereby negative pressure inside the one suction port unit increases to strongly suck the object surface. On the other hand, magnitude of a gap between opening of another suction port unit and the object surface increases and thereby negative pressure inside the another suction port unit decreases to weakly suck the object surface and another suction port unit is separated from the object surface. COPYRIGHT: (C)2005,JPO&NCIPI