| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element wherein an energy loss caused at the propagation of a surface acoustic wave is small and high input output efficiency can be obtained, a manufacturing method of the surface acoustic wave element, and an electronic apparatus provided with the surface acoustic wave element. SOLUTION: The surface acoustic wave element 11 is provided with: a substrate 12 configured of a piezoelectric material at least around the surface as a principal material; an IDT 13 deposited on the substrate 12 and stimulating a surface acoustic wave to the substrate 12; and an IDT 14 for converting the surface acoustic wave into an electric signal. Insulation protection films 17 are formed at upper sides of the IDTs 13, 14 with patterns nearly equal to the IDTs. The insulation protection film 17 is formed of a principal material such as silicon oxide. Further, the surface acoustic wave element 11 is provided with reflectors 15, 16 and the insulation protection films 17 are also formed at upper sides of the reflectors 15, 16 with pattern nearly equal to the reflectors. COPYRIGHT: (C)2005,JPO&NCIPI
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