| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer conveying machine that stably and easily conveys a wafer in a horizontal attitude through manual operation and restrains particles from sticking on the wafer and is short and small in occupation space. SOLUTION: Provided is an end effector which supports the outer periphery of the wafer in the horizontal attitude in point contact or linear contact or clamps the outer periphery. The end effector is fitted to a rectilinear shaft, and the rectilinear shaft, an elevation shaft, and a rotary shaft can manually be operated to convey the wafer through manual operation. The elevation shaft is fitted to the rotary shaft to avoid interferring with the movement of the rectilinear shaft and the movement of the rotary shaft, thereby lowering height of the whole conveying machine. COPYRIGHT: (C)2005,JPO&NCIPI
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