FORMATION METHOD OF LIGHT EMITTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a TFT substrate manufacturable at a low cost; and to provide a light emitting device having a large screen by the use of a deposition device capable of providing uniform film thickness on the entire substrate surface even for a large-area substrate. SOLUTION: In this application, a light emitting element is formed by carrying out deposition while moving a deposition source toward a large-area substrate 100 equipped with a pixel part (or a driving circuit) having TFTs using, as an active layer, an amorphous semiconductor film, a semiamorphous semiconductor film or an organic semiconductor film. COPYRIGHT: (C)2005,JPO&NCIPI