摘要 |
PROBLEM TO BE SOLVED: To provide a unique ventilation structure for a substrate heating dryer, extremely superior in practical use with almost no running cost required by using the heat of a heating portion to generate hot air while preventing the deposition of fibers flying over a substrate and evaporated solvent on the inner face of a storage part by removing them from the storage part when heating the substrate to dry a coating and a laminate as well as preventing the occurrence of drying irregularity in the coating and the laminate of the substrate by blowing the hot air having a temperature approximate to a substrate heating temperature out of a blowout portion. SOLUTION: The ventilation structure for the substrate heating dryer comprises the storage part 2 having the blowout portion 4 for blowing the hot air and an exhaust portion 5 for exhausting the hot air blown out of the blowout portion 4 to the outside of the storage part 2, and a hot air generation part 7 for heating air introduced into the storage part 2 with the heat of the heating portion 3 provided in the storage part 2 to generate the hot air which is blown out of the blowout portion 4. COPYRIGHT: (C)2005,JPO&NCIPI
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