| 摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid ejector ejecting a micro liquid drop in which ejection is stabilized, an ejection applying voltage is reduced, impact accuracy is enhanced, and the impact dot size is stabilized. SOLUTION: The liquid ejector 10 for ejecting a liquid drop of charged solution toward a substrate K comprises a liquid ejecting head 56 provided with a nozzle 51 having an inner diameter not larger than 25 [μm] at the forward end part for ejecting the liquid drop, a means 53 for supplying the solution into the nozzle 53, and a means 35 for applying an ejection voltage to the solution in the nozzle 51. The liquid ejector 10 is further provided with an ejection atmosphere conditioning means 70 for sustaining the variation range of relative humidity in the ejection atmosphere of the liquid ejection head 56 within±5% RH. COPYRIGHT: (C)2005,JPO&NCIPI
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