| 摘要 |
PURPOSE: A power up system of a dry pump is provided to minimize troubles of dry pump due to the powder accumulation in an exhaust line using hot-nitrogen transfers, 4-way valve and powder traps. CONSTITUTION: One hot-nitrogen transfer(13) is installed at the exhaust line side of a dry pump. Another hot-nitrogen transfer is installed at the exhaust line side of a scrubber. Trap A(19) and trap B(19') are installed in the hot-nitrogen transfer(13) through a 4-way valve(14). Gate valves(18,18') are installed in the hot-nitrogen transfer through a 3-way valve. The gate valves are mutually connected with the trap A and trap B. A controller is installed in order to control and regulate the above transfers, valves, traps.
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