SINGLE-CRYSTAL SAPPHIRE SUBSTRATE, MANUFACTURING METHOD THEREFOR, AND SEMICONDUCTOR LIGHT-EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a sapphire substrate for a semiconductor light-emitting element which has a principal surface in which grooves or projections/depressions with stripe shapes are efficiently formed by a method suitable for mass production, and to provide a manufacturing method therefor.

SOLUTION: A single-crystal sapphire substrate formed with projections/depressions having etch pits is manufactured by wet-etching with a hot phosphoric acid or the like by use of a protective film which is mainly composed of SiO2as a mask.

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