| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film crystal solar cell of high performance (high efficiency) of low cost LBSF (Localized BSF) structure and strip lateral electrode structure, and also to provide its manufacturing method. <P>SOLUTION: The method for manufacturing a thin film crystal solar cell is characterized by containing: a process (A) wherein a solid phase impurity diffusing source layer is formed in a predetermined region, after a silicon film is formed on the whole surface on a maintenance substrate, or a silicon film is formed on the whole surface after the solid phase impurity diffusing source layer is formed in the predetermined region on the maintenance substrate; and a process (B) wherein the silicon film is crystallized or recrystallized by applying heat or optical energy, and a high concentration impurity region is formed in a predetermined region of the silicon film, thereby forming a crystal silicon layer having the high concentration impurity region. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
