| 摘要 |
PROBLEM TO BE SOLVED: To provide semiconductor manufacturing equipment which is reduced in entire volume, suppresses occurrence of particles, and prevents any damages to a wafer due to falling thereof when mounting and demounting it. SOLUTION: A wafer holder is supported by an electrode for supplying power to an electric circuit formed inside or on the surface of the wafer holder, resulting in eliminating any member for supporting the wafer holder and hence reducing the volume of a container. Since there are a few components, the occurrence of particles is suppressed. The electrode is fixed to a base, and lift pins are set and fixed in the container of the semiconductor manufacturing equipment. By driving the base up and down, the wafer holder is driven up and down, allowing the lift pins to project on the top face of the wafer holder and to retreat under the top face of the wafer holder to mount and demount the wafer, resulting in preventing the falling of the wafer when mounting and demounting it. COPYRIGHT: (C)2005,JPO&NCIPI |
