| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding mechanism capable of holding beam-irradiated objects having different sizes from each other. SOLUTION: A notch pin 22 is attached to the surface of one side of a holder main body 4. Fastening rollers 6A, 6B are attached to the surface of the other side of a driving plate 5, and the driving plate is so constituted as to be able to slide it relatively to the holder main body 4 from one side to the other side or from the other side to one side. When moving the driving plate 5 from the other side to one side, in the case of the fastening rollers 6A, 6B being contacted with a wafer during the moving of the driving plate, a wafer W<SB>L</SB>is held by the fastening rollers 6A, 6B and the notch pin 22. In the case of the fastening rollers 6A, 6B being non-contacted with any wafer, based on the further moving of the driving plate, fastening pins 13A, 13B and a notch pin 16 are so protruded on the surface of the holder main body 4 as to hold a wafer W<SB>S</SB>by the fastening pins 13A, 13B and the notch pin 16. COPYRIGHT: (C)2005,JPO&NCIPI |
