摘要 |
PROBLEM TO BE SOLVED: To attain a state independent of polarization for sensibility and to attain stably a state independent of polarization regardless of a spot size of incident light. SOLUTION: A light receiving semiconductor element is composed of laminated layer structures 11, 12 including a light absorption layer 12 formed on a substrate 14. The incident light 18, 19 come into the absorption layer 12 from below diagonally, reflect on the surface of the laminated layer of the semiconductor, and are introduced to the light absorption layer 12 again. An electrode 15 is formed on the laminated layer structure, the portion which is adjacent to the surface, is lattice-like in shape. COPYRIGHT: (C)2005,JPO&NCIPI
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