摘要 |
PROBLEM TO BE SOLVED: To provide a carrier and an analysis apparatus provided with it. SOLUTION: The analysis apparatus is provided with a sample holder 31 where a sample is mounted and having a guide groove, a sample-receiving part 11 for mounting the sample holder 31 and having a guide rail, coupled to the guide groove and a sample elevating part 19 for vertically elevating the sample receiving part 11 and loading and ejecting the sample holder 31. The sample elevating part 19 is the carrier 10 installed in the inside a driving part 25 for vertically driving the sample-receiving part 11 and a vacuum chamber internally placing the driving part 25 and hermetically maintaining vacuum. As a result, moisture is shielded and an accurate analysis can be implemented. COPYRIGHT: (C)2005,JPO&NCIPI
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