| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectral measurement array, a spectral image measurement device provided with the same, and a spectral image measurement method provided with a spectral element, capable of simultaneously observing temporal change and the spatial change of the spectrum, capable of separation of light by a pixel unit, and capable of high-speed operation with a small/simple structure. SOLUTION: A diffraction grating supported on a substrate turnable freely is tilted by impressing an electric field, electrically driven mechanical spectral elements for separation of light incident on the diffraction surface are arranged two dimensionally in plural number, and each of these spectral elements is capable of independently setting its tilt angle. The spectral element is constituted of movable electrodes for tilt driving the diffraction grating and multiple layers of fixed electrodes oposing to the movable electrodes, provided at the side of the diffraction grating of lamination corresponding to set the tilt angle. COPYRIGHT: (C)2005,JPO&NCIPI
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