INKJET RECORDING HEAD, METHOD OF MANUFACTURING THE SAME, INKJET RECORDING CARTRIDGE, INKJET RECORDER, AND METHOD OF MANUFACTURING HOLLOW STRUCTURE BODY

摘要

PROBLEM TO BE SOLVED: To provide an inkjet recording head having a nozzle (an ink ejection opening) with a high ink ejection stability and a method of manufacturing the same. SOLUTION: This inkjet recording head has a head chip 3 formed by bonding a channel substrate 2 (ink channel substrate) having an ink channel 14 formed thereon and a heater substrate 1 (a heating element substrate) having a heater 11 (heating element) formed thereon with each other. The nozzle 17 (ink ejection opening) communicating with the ink channel 14 is provided to one end face of the head chip 3 such that the whole inner wall of the nozzle 17 is formed of the channel substrate 2. The nozzle 17 (ink ejection opening) is formed by an etching process. COPYRIGHT: (C)2005,JPO&NCIPI