| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that an undesirable influence by organic matter is not taken into consideration, which is generated due to a member itself constituting a vacuum treatment apparatus to be used for manufacturing an organic EL element, or the like. SOLUTION: Each of the members of the vacuum treatment apparatus is subjected to such a treatment that the emission of the organic matter component is decreased while finding that the element is contaminated with the organic matter component emitted from each of the members such as a crucible and a gasket constituting the vacuum treatment apparatus. For example, the crucible is formed from a material having low catalytic activity to a material to be deposited by evaporation. The gasket is subjected to such a treatment that the elution of the organic matter is decreased or formed from a material containing little organic matter. COPYRIGHT: (C)2005,JPO&NCIPI
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