发明名称 |
DEAERATION APPARATUS, DEAERATING METHOD AND LIQUID SUPPLYING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a deaeration apparatus for separating/removing air bubbles contained in a liquid. SOLUTION: The deaeration apparatus for removing a gas contained in the liquid is provided with: a vessel 72; a supply branched pipe 22a for supplying the gas-containing liquid to the inside of the vessel 72 from the upper part; another supply branched pipe 22b arranged at the bottom of the vessel 72 for making the liquid supplied to the vessel 72 flow out of the vessel 72; a gas separating member 73 which is arranged in the vessel 72 and to which the air bubbles contained in the liquid, which is supplied from a supply part and flows out of the pipe 22b, are stuck and separated from the liquid; and a ventilation pipe 74 for discharging from the vessel 72 the air bubbles which are stuck to the member 73 and rise in the vessel 72. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005058842(A) |
申请公布日期 |
2005.03.10 |
申请号 |
JP20030208020 |
申请日期 |
2003.08.20 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
TOYOSHIMA NORIO;MORIMITSU MAKI |
分类号 |
B01D19/00;B01J4/00;H01L21/027;(IPC1-7):B01D19/00 |
主分类号 |
B01D19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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