发明名称 ULTRASONIC VIBRATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To enable a jet stream or a capillary wave to be generated at a liquid surface with sufficient energy efficiency by converging ultrasonic waves near the liquid surface and to attain energy saving by reducing necessary energy of the ultrasonic wave when the jet stream or the capillary wave is generated at the liquid surface. SOLUTION: The subject ultrasonic vibration apparatus has a tub filled up with liquid, an ultrasonic vibrator arranged at a bottom side of the tub and a cylindrical member which is arranged near the liquid surface of the liquid in the tub and is also arranged so that one opening of which is opened at a liquid surface side and another opening of which is opened at an ultrasonic vibrator side. Ultrasonic wave spreading in the liquid in company with ultrasonic vibration of the ultrasonic vibrator is reflected by an inner peripheral surface of the cylindrical member and the ultrasonic waves are converged near the liquid surface. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005058804(A) 申请公布日期 2005.03.10
申请号 JP20030206939 申请日期 2003.08.08
申请人 SHIMADA PHYS & CHEM IND CO LTD 发明人 SANO MITSUGI
分类号 B08B3/12;H01L21/304;(IPC1-7):B08B3/12 主分类号 B08B3/12
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