SUBSTRATE TRANSFER APPARATUS WITH TILT ADJUSTING PART TO TRANSFER EASILY SUBSTRATE IN TILTED STATE

摘要

PURPOSE: A substrate transfer apparatus is provided to transfer easily a substrate in a tilted state by using a tilt adjusting part. CONSTITUTION: A substrate transfer apparatus includes a base part, a moving part, a robot arm, a hand part(150), and a tilt adjusting part. The base part is used for fixing the substrate transfer apparatus itself to a predetermined place. The moving part is installed at the base part. The robot arm(130) is installed at the moving part to rotate the hand part for loading a substrate. The hand part is installed at one end of the robot arm. The tilt adjusting part(140) is used for adjusting the tilt of the hand part.