| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the generation of mishandling and the adhesion of dust to a substrate at the time of taking out the substrate by a robot as to a substrate holding case for holding the substrate in a vertical position. <P>SOLUTION: The substrate holding case 1 is provided with an outer box 3 of which the upper part is opened, and an inner box 4 to be attached/detached to/from the inside of the outer box 3 and capable of holding the substrate 2 to be inserted from the upper part along a substrate holding groove 4b of the inner box 4 in the vertical position. Legs 4c, 3b for holding the inner box 4 and/or outer box 3 in a laid position are formed on the outside surface of the inner box 4 and/or outer box 3. When the inner box 4 and/or outer box 3 are supported by the legs 4c, 3b, the substrate 2 is held in a horizontal position, and the horizontal insertion/extraction of the substrate 2 can be allowed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
