| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a scanning probe microscope apparatus capable of spectroscopic measurement and near-field measurement, in addition to conventional scanning probe measurement. <P>SOLUTION: The scanning probe microscope for inspecting an object is provided with a probe having a chip of sharp tip; a means for inducing and detecting non-optical interaction between the chip and the object; a light source optically combined to the chip for providing light for the chip; the chip having a sharp tip shape of for emitting the provided light, in such a way that the emitted light may optically interact with the object; and a photodetector for detecting the light, generated by the optical interaction between the emitted light and the object. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
