| 发明名称 |
Vacuum processing apparatus |
| 摘要 |
A vacuum processing apparatus includes a vacuum processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas. The vacuum processing chamber has an axisymmetric structure, including a double wall structure, and a gate valve for sealing an opening through which the object enters the processing chamber.
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| 申请公布号 |
US2005051093(A1) |
申请公布日期 |
2005.03.10 |
| 申请号 |
US20040812087 |
申请日期 |
2004.03.30 |
| 申请人 |
MAKINO AKITAKA;TAKAHASHI YOUJI;SORAOKA MINORU;KIHARA HIDEKI;TAUCHI SUSUMU |
发明人 |
MAKINO AKITAKA;TAKAHASHI YOUJI;SORAOKA MINORU;KIHARA HIDEKI;TAUCHI SUSUMU |
| 分类号 |
C23C16/00;H01L21/00;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/00 |
| 代理机构 |
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