Speckle interferometer for measuring the surface structure of an object being examined has a coupling mirror unit, which can be moved between defined deflection positions, for coupling primary laser beams into an examination beam

摘要

Speckle interferometer (1) for measuring the surface structure of a measurement object has a multiplicity of coherent primary beam (6, 9) emitting radiation sources (4, 5). The primary emitted beams are aligned using a coupling mirror unit (8) that can be moved between predefined deflection positions.