| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently overlap a simultaneously implemented low resolution/high resolution parallel scan system and a method with a high resolution defect review and a classifying step for automatically deciding and overcoming a defect at low resolution, operate them in parallel, and improve a scanning and treating process of an inspection system for a flat object such as a large flat plate adopted in a panel display. <P>SOLUTION: A method effectively overcomes a general problem such that the defect on a surface of a flat article is optically inspected. The method is especially useful when the defect in a pattern on a large glass plate deposited along with an integrated circuit forming a LCD flat panel display is detected. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
