| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an heating material with a built-in electrode, which eliminates variation of the thickness of dielectric layers, and uniformizes the generation of plasmas to improve the yield of products. SOLUTION: The manufacturing method includes processes of: forming a ceramic sintered body 1 or a ceramic calcined body; forming an electrode (high-frequency electrode 2) on the ceramic sintered body 1 or a ceramic calcined body; and forming a ceramic base material, in which a metal having a high melting point (resistant heating body 4) is mainly embedded, on the electrode (high-frequency electrode 2), to make the heating material with the built-in electrode. COPYRIGHT: (C)2005,JPO&NCIPI |
