| 摘要 |
PROBLEM TO BE SOLVED: To provide a diffraction optical element which has strong adhesion force to an interface and which hardly peels. SOLUTION: A glass substrate 1 on an upper surface of which a relief pattern is formed, is manufactured (a). An aluminum oxide layer 2 and a silicon oxide layer 3 are film-formed in order on the upper surface of the glass substrate 1 (b). Further, a silane coupling processing is performed thereon and successively a UV curing resin layer 4 is formed on the silicon oxide layer 3 by using a dispenser (c). After molding by holding the UV curing resin layer 4 between the glass substrate 1 and a mold 5 which is made of a UV-transmissive material and a lower surface of which is planar, the UV curing resin layer 4 is irradiated with UV through the mold 5 to cure the UV curing resin layer 4 (d). When exfoliated from the mold 5, the diffraction optical element 6 which is constituted of the glass substrate 1, the UV curing resin layer 4, the aluminum oxide layer 2 and the silicon oxide layer 3 held therebetween and in which the relief pattern is formed at a boundary surface between the glass substrate 1 and the UV curing resin layer 4, is completed. COPYRIGHT: (C)2005,JPO&NCIPI
|
