LIFT HOOP OF ASHING CHAMBER IN SEMICONDUCTOR ETCHING APPARATUS TO ALIGN TITLED WAFER

摘要

PURPOSE: A lift hoop of an ashing chamber in a semiconductor etching apparatus is provided to align titled wafers using an inclined portion of a lift hoop. CONSTITUTION: A lift hoop of an ashing chamber includes an inclined portion and a flat portion. Three wafer supporting portions(500) are linked by a ring-shaped body from the outer side. The outer side of the inclined portion(502) is higher than the inner side thereof. A wafer is placed at the flat portion(504) formed in the inner(lower) side of the inclined portion. A wafer is supported by three wafer supporting portions.