| 摘要 |
<P>PROBLEM TO BE SOLVED: To accomplish both improvement of reliability and a luminescence characteristic of an electroluminescence element, and improvement of productivity thereof. <P>SOLUTION: In this electroluminescence element, a layered structure is employed for an upper electrode 40 including a first upper conductive layer 42 formed through evaporation, a buffer layer 46, and a second upper conductive layer 44 formed through sputtering. By interposing the buffer layer 46 between the first and second upper conductive layers, damages to a light emitting element layer 30 formed below the upper electrode 40 and containing an organic material or the like having a low resisting characteristic against sputtering environment can be prevented while a high level of a charge injection efficiency to the light emitting element layer 30 is maintained for charges such as electrons and holes, and, at the same time, a conductive layer can be formed with superior coverage and uniformity, to a sufficient thickness, and with superior productivity. The buffer layer 46 may have a multi-layer structure. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
