发明名称 MANUFACTURING METHOD OF ELECTRONIC DEVICE AND ELECTRONIC DEVICE THEREOF, AND MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electronic device which has less restriction in the design of an IC chip and a package, improves productivity, and has easy generalization, in the case of manufacturing the highly functional electronic device by integrating to a high-density. <P>SOLUTION: The manufacturing method of the electronic device includes a process for forming an adhesive layer 5 on a slave chip 3, and a process for mounting the slave chip 3 on a master chip 2, so that most of the whole surface of the electrode formation surface of a second electronic device, i.e. the slave chip 3, having an electrode connected to the Au stud bump 1 of the master chip 2, is covered, while the second electronic device, i.e. the slave chip 3 is mounted on a first electronic device, i.e. the master chip 2 having a metallic bump electrode, i.e. an Au stud bump 1. The interval between the master chip 2 and the slave chip 3 is sealed by the adhesive layer 5 while the Au stud bump 1 of the master chip 2 penetrates the adhesive layer 5 in the process for mounting the slave chip 3 on the master chip 2, to connect to electrodes on the slave chip 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005064362(A) 申请公布日期 2005.03.10
申请号 JP20030295067 申请日期 2003.08.19
申请人 NEC ELECTRONICS CORP 发明人 KURITA YOICHIRO;OOUCHI RIEKA;MIYAZAKI TAKASHI;YAMADA TOSHIYUKI
分类号 H01L25/18;H01L21/56;H01L21/60;H01L21/98;H01L23/28;H01L23/48;H01L23/50;H01L25/065;H01L25/07 主分类号 H01L25/18
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