| 摘要 |
PROBLEM TO BE SOLVED: To complete an adjusting work in a relatively small amount of time, which is carried out prior to the inspection of an object to be inspected. SOLUTION: An adjusting member 4 in the form of a rectangular parallelepiped (column body) is disposed at an inspection position on a carrier line. An axis of rotation 4A is installed and fixed to both end faces of the adjusting member 4. The axis of rotation 4A is coupled to the motor shaft of a stepping motor 6, and the adjusting member 4 is rotated on the axis of rotation 4A. The adjusting member 4 has a length dimension covering the whole width of the carrier line at the inspection position and includes a focusing adjusting plane 4a, a background plane 4b and a shading compensating plane 4c which are parallel to a carrier plane at respective rotating angular positions. The focusing adjusting plane 4a and the shading compensating plane 4c are moved to a height position through which the surface of the object to be inspected S being carried on the carrier line passes, at the respective rotating angular positions at which these planes 4a, 4c are parallel to the carrier plane. COPYRIGHT: (C)2005,JPO&NCIPI |
