MEASURING METHOD FOR CRYSTAL LATTICE CONSTANT BY CONVERGENCE ELECTRON DIFFRACTION

摘要

PROBLEM TO BE SOLVED: To provide a convergence electron diffraction measuring method capable of measuring all of six parameters of lattice constants in a microregion. SOLUTION: In this convergence electron diffraction method for acquiring a disc-shaped diffraction figure, by making electron beams converge and irradiate to a sample, all of six (a, b, c, α, β, γ) lattice constants of a crystal can be measured from the microregion smaller than 10 nm, from the distance between the intersection points of HOLZ line appearing in a transmission disc. COPYRIGHT: (C)2005,JPO&NCIPI