Capping layer for crystallizing germanium, and substrate having thin crystallized germanium layer

摘要

A structure comprising at least one layer of germanium formed on a surface of a ceramic substrate. The layer of germanium has a thickness of not larger than 10 microns and includes grains having grain size of at least 0.05 mm. Also, a structure comprising at least one layer of germanium formed on a surface of a ceramic substrate, and at least one capping layer formed on a surface of the layer of germanium. Also, a method of forming a thin film germanium structure, comprising forming at least one layer of germanium on a surface of a ceramic substrate, then forming at least one capping layer on a surface of the layer of germanium, followed by heating and then cooling the layer of germanium.