发明名称 METHOD AND SYSTEM FOR THE PRODUCTION OF SUPERCONDUCTING INDUCTIVE COMPONENTS COMPRISING THIN LAYERS, AND DEVICES CONTAINING SUCH COMPONENTS
摘要 <p>The invention relates to a method of producing a superconducting inductive component in the form of one or more line segments comprising a stack of alternate superconducting and insulating films. The invention also relates to the system which is used to implement said method, comprising: means for depositing a superconducting film, means for depositing a stack of alternate superconducting and insulating films, and means for etching all of the deposited films, said means being arranged such that the latter only occurs at the locations where an inductive component is to be implanted.</p>
申请公布号 WO2005022566(A1) 申请公布日期 2005.03.10
申请号 WO2004FR01873 申请日期 2004.07.16
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;BERNSTEIN, PIERRE-ERNEST;HAMET, JEAN-FRANCOIS, MAURICE;TOUITOU, NABIL 发明人 BERNSTEIN, PIERRE-ERNEST;HAMET, JEAN-FRANCOIS, MAURICE;TOUITOU, NABIL
分类号 H01F6/06;H01L39/12;H01Q1/36;H01Q21/00;H03H7/32;(IPC1-7):H01F41/00;H03H7/01 主分类号 H01F6/06
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