| 摘要 |
PURPOSE: A deposition source for an organic electro-luminescent light emitting layer is provided to prevent curing of vapors around an aperture by maintaining the temperature of the aperture using a metallic layer with high heat conductivity. CONSTITUTION: A deposition source is heated by an applied source and transfers heat to a deposition material(M) contained therein. The material vapor generated by the deposition material is emitted to outside to form a vaporized material layer on a substrate surface. A sidewall member(1B) includes a heater to transfer the heat to the deposition material. The deposition source(1) includes a bottom member(1C), an upper member(1A), and a metallic layer. The upper material includes a vapor efflux aperture. The metallic layer is formed on a bottom of the upper member and has high heat conductivity.
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