| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor angular velocity sensor device capable of compensating measurement error accompanying the characteristic variation of sensing element, making most of sensor performance. <P>SOLUTION: A semiconductor angular velocity sensor device 1 comprises the angular velocity sensor 10 provided with a sensing element 12 consisting of a piezoelectric material, a drive electrode 14 of the angular velocity sensor, a drive circuit 20 connected with a drive monitor electrode 15 and vibrating the sensing element with maximum amplitude, and a detection circuit 30 connected with pick-up electrodes 16 and 17 of the angular velocity sensor and outputting signal proportional to the angular velocity added to the sensing element. The drive circuit includes a detecting means for detecting the primary vibration of the sensing element. The detection circuit comprises a charge amplifier 31 for detecting the angular velocity added to the sensing element and a control means for controlling the gain according to the output of the detecting means so that the effects of amplitude variation of the primary vibration of the sensing element do not appear in the output of the detection circuit. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
