| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a functional droplet discharge head washing apparatus which can prevent the contamination of washing liquid by liquid feeding and recover the washing liquid contaminated little, a washing method, a droplet discharge apparatus, an electro-optical device manufacturing method, an electro-optical device, and an electronic device. <P>SOLUTION: The functional droplet discharge head washing apparatus for washing the head by passing the washing liquid through a channel in the head has a washing liquid tank, a washing liquid recovering part for recovering the washing liquid passed through the channel in the head, a washing liquid channel for leading the washing liquid to the washing liquid recovering part from the washing liquid tank through an introduction part connection joint and a cap, a liquid passing means for passing the washing liquid through the washing liquid channel, a compulsive ventilation means which compulsively ventilates the washing liquid channel while air is introduced into the channel, and a control means which passes air compulsively through the washing liquid channel by driving the compulsive ventilation means after the end of the passage of the washing liquid. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
