发明名称 EVALUATE METHOD AND EVALUATE DEVICE FOR FLUORITE, AND FLUORITE
摘要 PROBLEM TO BE SOLVED: To provide a method of measuring easily a transmittance distribution and a laser durability distribution of a large aperture of fluorite. SOLUTION: In this evaluation method for a fluorite crystal for irradiating the fluorite crystal with an ultraviolet ray to measure generated fluorescence, a photoreception part for measuring the fluorescence is arranged in a position where the ultraviolet ray transmitted through the fluorite crystal passes. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005061903(A) 申请公布日期 2005.03.10
申请号 JP20030290070 申请日期 2003.08.08
申请人 CANON INC 发明人 SAKAI KEITA
分类号 G01N21/64;G01N17/00;H01L21/027;(IPC1-7):G01N21/64 主分类号 G01N21/64
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