| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and device capable of discriminating an unevenness generated on an inspected object surface from a deposit for detecting only the harmful unevenness precisely as a defect. SOLUTION: This surface inspection device 100 is provided with a lighting system 1 for emitting slit-like illumination light to an inspected object M, a two-dimensional imaging device 2 for imaging reflected light thereof, and an image processor 3 for detecting the defect based on a shape of a slit part in a picked-up image. The image processor 3 acquires the picked-up image in every predetermined moving distance to be stored in the first image memory, as to the inspected object M moving along a direction substantially perpendicular to an extension direction of the illumination light, distances up to the first picture element having a predetermined prescribed value or more of concentration value viewed from a direction perpendicular to an extension direction of the slit part are measured in order along the extension direction of the slit part, as to the stored respective picked-up images, the concentration values in response to the distances are stored in order in the second memory, and the each stored image is image-processed to detect the defect. COPYRIGHT: (C)2005,JPO&NCIPI
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