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发明名称
Method of producing a poly-Si TFT by using a Mo substrate
摘要
申请公布号
KR100476169(B1)
申请公布日期
2005.03.10
申请号
KR20020026091
申请日期
2002.05.13
申请人
发明人
分类号
H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L29/786
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代理人
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