| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating reed, a support structure thereof, a piezoelectric vibrator, and a vibration type piezoelectric gyroscope, for keeping stable drive vibration and detection vibration. <P>SOLUTION: A piezoelectric vibrating reed 10 comprises a base part 12, a plurality of drive vibration arms 16-1 to 16-4 extending radially in the same plane from the base part 12, and detection vibration arms 20-1 and 20-2. A plurality of elastic first beams 32-1 to 32-4, extending from the base part 12 and at least first support parts 30-1 to 30-4 formed at the tip of the beam, are formed between the vibration arms. The drive vibration arm and the detection vibration arm are provided with an electrode pattern and are connected to a semiconductor device 80 for driving. The piezoelectric vibrating reed 10 is housed in the vessel composed of a base member 82 and a lid member 84, to constitute a piezoelectric vibrator 200 and a vibration type piezoelectric gyroscope 90, for maintained stable drive vibration and detection vibration. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
