| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction device and a chuck table that have all main functions for sucking a sucked object, are small and excellent in portability, and have small amount of adhered dirt. SOLUTION: The suction device 1 comprises a pedestal 2 and a driving mechanism 3 stored in the pedestal 2. Specifically, a suction hole 21 and a release hole 22 are punched in the ceiling 20 of the pedestal 2, and an air supply port 25 and an air exhaust port 26 are disposed in a sidewall 24. A ceramic porous 4 is placed on the ceiling 20. The driving mechanism 3 comprises a change-over apparatus 30 and a vacuum generator 31, and sucks or releases a workpiece W from the pedestal 2 using air supplied from the air supply port 25 by operation of a knob 30e. Preferably, the pedestal 2 is made of titanium, and a waveform swell 24a is formed on the sidewall 24. COPYRIGHT: (C)2005,JPO&NCIPI |
