| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of creating transfer mask data which controls an increase of data volume on the way of processing. <P>SOLUTION: The method, which creates the transfer mask data from design data having a hierarchical structure composed of a plurality of cells, includes at least: a step which divides the design data into each of subfields, a step which treats outline of pattern for each of subfield; step which, for each of subfields, in order, spreads out the hierarchical structure flatly and divides it into rectangular patterns, allots the divided patterns to complementary masks, and re-hierarchizes them after finishing the treatment; a step which, for each of subfields, in order, spreads out the hierarchical structure re-hierarchized flatly, carries out an approach effect correction for the design data, and re-hierarchizes the structure after finishing the treatment; and a step which integrates the subfields to format-convert to the transfer mask data. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
