OPTICAL WAVEGUIDE TYPE SENSOR

摘要

PROBLEM TO BE SOLVED: To construct a small-sized analytical system. SOLUTION: A silicon fine line core 105, and a clad layer 106 formed to bury both sides of the silicon fine wire core 105 are formed in a detection area, so as to constitute a waveguide. A cross-sectional dimension of the silicon fine line core 105 is about 1μm square. An under face and both side faces in a substrate part 111 of the silicon fine wire core 105 are coated with silicon oxide, and an upper face serves as a waveguide of an exposed condition. Light having 4μm or less of wavelength is propagated by a single mode in the waveguide, since the silicon fine wire core 105 has about 1μm square of cross-sectional dimension. COPYRIGHT: (C)2005,JPO&NCIPI