| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator that is of a simple structure and capable of performing precise position control. SOLUTION: This electrostatic actuator is provided with a mover that has comb-like electrodes arranged at prescribed intervals and a stator that has drive electrodes connected and arranged at prescribed intervals and every plurality. A first AC voltage is impressed to the comb-like electrode of the mover by an AC generating device 21 to generate a first progressive wave in the array of the comb-like electrodes. Also, when a second AC voltage is impressed to the drive electrodes of the stator by an AC driving source 20 to generate a second progress wave in the array of the drive electrodes, an operation circuit 52 of an AC source control device 50 controls the displacement of the mover by changing the phase difference of the first and second progressive waves. COPYRIGHT: (C)2005,JPO&NCIPI
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