| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable inductor that can be formed on a semiconductor substrate, is reduced in the deterioration of its Q-value, and is large in the variation of inductance. SOLUTION: A spiral inductor 2 is formed on a semiconductor substrate 1 in a semiconductor treating step. A conductor plate 3 which is a magnetic flux changing means and an actuator which moves the plate 3 are disposed at positions at which the magnetic flux 4 of the inductor 2 can be changed. The magnetic flux 4 of the inductor 2 is changed by horizontally moving the conductor plate 3, for example, above or nearly above the inductor 2 by using the actuator. In addition, it is also possible to change the inductance by horizontally moving the conductor plate 3 between two stages of inductors. COPYRIGHT: (C)2005,JPO&NCIPI
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