| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin vapor deposition unit with which the resin distribution uniformity is improved in a relatively simple manner, and the distribution is ensured for a long period of time. SOLUTION: The resin vapor deposition unit to perform film deposition on a cylindrical surface of a rotating drum-shaped can roll has structure in which resin vapor guided by the inner wall of the unit is exhausted into other units in the circumferential direction or exhausted into a main exhaust system. With the structure, the resin vapor has an effective exhaust flow rate higher than an excessive resin vapor amount which does not contribute to film deposition. Thus, the resin vapor flow rate is increased and maintained, and dispersion in the film deposition rate can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI
|
