ELECTROSTATIC SUCTION TYPE FLUID DISCHARGE APPARATUS AND METHOD FOR FORMING PLOTTING PATTERN USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic suction type fluid discharge apparatus in which the minute hole diameter of a nozzle and the lowering of drive voltage are made compatible and the stable discharge of fluid is realized when the minute nozzle is realized. SOLUTION: When the nozzle diameter of a fluid discharge head 200 is made so fine as 0.01-25μm, the lowering of the drive voltage in the discharge is attained by the minute nozzle. A prescribed charge pattern is formed by giving deposition charge 50 to an insulative substrate 20 by a charge applying head 100 before the formation of a plotting pattern by the discharge fluid. The fluid discharged by carrying out the discharge of the fluid from the fluid discharge head 200 is attracted to the deposition charge 50 to form the stable fine pattern on the charged pattern. COPYRIGHT: (C)2005,JPO&NCIPI