PRESSURE-BASED GAS DELIVERY SYSTEM AND METHOD FOR REDUCING RISKS ASSOCIATED WITH STORAGE AND DELIVERY OF HIGH PRESSURE GASES
摘要
A method of reducing ventilation gas flow rate through a gas cabinet comprising a gas source vessel and a gas delivery system comprising a gas cabinet.
申请公布号
EP1511583(A1)
申请公布日期
2005.03.09
申请号
EP20030736812
申请日期
2003.05.29
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
OLANDER, KARL, W.;DONATUCCI, MATTHEW, B.;WANG, LUPING;WODJENSKI, MICHAEL, J.
