METHOD OF BONDING SUBSTRATES TO ENHANCE BONDING STRENGTH BY IRRADIATING VARIOUS KINDS OF PARTICLE BEAMS ON SURFACES OF SUBSTRATES AND METHOD FOR IRRADIATING PARTICLE BEAMS THEREON

摘要

PURPOSE: A method of bonding substrates and a method of irradiating particle beams thereon are provided to improve the bonding strength of the substrates by using a plasma irradiation method and a radical irradiation method. CONSTITUTION: A first irradiation process is performed to irradiate oxygen particle beams on a surface of each of first and second substrates(800a,800b). A second irradiation process is performed to irradiate nitrogen particle beams on the surface of each of the first and second substrates, simultaneously with or subsequently to the first irradiation process. A bonding process is performed to bond the substrates to each other. The first irradiation process includes a process for irradiating oxygen plasma. The second irradiation process includes a process for irradiating nitrogen radicals.