| 摘要 |
PURPOSE: A substrate transferring apparatus is provided to remove the static electricity due to friction between a contact roller and a substrate, thereby preventing electrostatic particles from attaching to the substrate, by connecting the contact roller to a grounding part. CONSTITUTION: A substrate transferring apparatus comprises a frame(40), a plurality of pivots(10), and a plurality of contact rollers(20). The pivots are supported by the frame and arranged in parallel. The contact rollers are coupled to the respective pivots and transfer a substrate(30). Herein, the pivots are electrically connected to a grounding part(50). Each pivot has conduction regions continuing in a longitudinal direction thereof. The contact rollers are electrically connected to respective pivots. Each of the contact rollers has conduction region, which is in contact with the substrate.
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